ANDOVER (AP) -- MKS Instruments Inc. said Tuesday that it has acquired Alter Power Systems Srl for an undisclosed amount of cash, marking its expansion into the industrial heating and food and beverage markets.

Based in Italy, Alter develops microwave power generators, components and systems for industrial microwave heating, microwave plasma coating and semiconductor uses.

MKS, which makes analysis and processing equipment for semiconductor companies, said Alter's expertise in microwave design will boost its existing product lineup and expand it into non-plasma uses including the industrial heating and food and beverage markets.

The deal closed Tuesday. MKS said Alter will continue to operate in Italy as an MKS subsidiary.

Shares of MKS fell 54 cents, or 2 percent, to $27.38 in late-afternoon trading.


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